Micro Electro Mechanical Systems (MEMS)

NM GmbH offers modeling and simulation support for R&D projects in the field of micro-electro-mechanical-systems (MEMS). We have vast experience in the application of FE-methods to a variety of physical processes in MEMS devices.

Modeling of bimorphic micromirror structures

This joint project between NM GmbH and the University of Applied Sciences Buchs (NTB), convincingly demonstrates how powerful the NM approach to engineering problems can be. The project focused on the development of a bimorphic microscale tilting mirror for laser eye surgery. Such mirrors allow fast and precise control of the laser beam during surgery. By attaching the mirror to a Si-Al structure, both the mirror and its control system are merged to a single integrated circuit. The displacement of the mirror is then governed by the different electro-thermo-mechanical properties of silicon and aluminium. The design offers a space- saving floor-plan, as well as a massive reduction in production costs.